1. Nkọwa sistemu nnukwu gas:
Nchekwa na njikwa nrụgide nke gas inert ụdị gas: Ụdị ikuku inert (nitrogen, argon, ikuku abịakọrọ, wdg)
Ogo pipeline: Site na 1/4 ( pipeline na-enyocha ) ruo 12-inch isi pipeline
Ngwaahịa bụ isi nke usoro ahụ bụ: valvụ diaphragm / bellow valve / valvụ bọọlụ, njikọ dị elu dị ọcha (VCR, ụdị ịgbado ọkụ), njikọ ferrule, valvụ na-achịkwa nrụgide, nlele nrụgide, wdg.
Ka ọ dị ugbu a, usoro ọhụrụ ahụ gụnyekwara nnukwu gas pụrụ iche, nke na-eji cylinder gas ma ọ bụ gwongworo tankị maka nchekwa na njem.
2. Nkọwa Sistemu Ọcha:
Mwepụ nke adịghị ọcha site na nnukwu gas maka pipeline gas dị ọcha
3. Nkọwa kabinet gas:
Nye njikwa nrụgide na nleba anya nrịbama maka isi mmalite gas pụrụ iche (nsi, ọkụ ọkụ, reactive, gas na-emebi emebi), ma nwee ikike iji dochie cylinders gas.
Ebe: Dị n'ala Sub-fab ma ọ bụ ala ala maka nchekwa nke gas pụrụ iche Isi Iyi: NF3, SF6, WF6, wdg.
Ogo pipeline: pipeline gas dị n'ime, n'ozuzu 1/4 inch maka pipeline usoro, 1 / 4-3 / 8 inch tumadi maka ịdị ọcha nitrogen dị ọcha pipeline.
Isi ngwaahịa: valvụ diaphragm dị ọcha dị elu, valvụ nlele, ihe nrụnye nrụgide, ihe nrụnye nrụgide, njikọ dị ọcha dị elu (VCR, ụdị ịgbado ọkụ) Igwe gas ndị a nwere ikike ịgbanwee akpaaka maka cylinders iji hụ na ọkọnọ gas na-aga n'ihu na nnọchi nchekwa nke cylinders.
4. Nkọwa nkesa:
Ijikọ isi iyi gas na eriri mkpokọta gas
Ogo ahịrị: N'ụlọ ọrụ mgbawa, nha nke pipeline nkesa gas na-adịkarị site na 1/2 inch ruo 2 inch.
Ụdị njikọ: A na-ejikọta pipeline gas pụrụ iche site na ịgbado ọkụ, na-enweghị njikọ ọ bụla ma ọ bụ akụkụ ndị ọzọ na-akpụ akpụ, tumadi n'ihi na njikọ ịgbado ọkụ nwere ntụkwasị obi siri ike.
N'ime ụlọ ọrụ mgbawa, e nwere ọtụtụ narị kilomita nke tubing ejikọrọ na-ebufe gas, nke dị ihe dị ka ụkwụ 20 n'ogologo na agbakọta ọnụ. Ụfọdụ tubing bends na tubular njikọ ịgbado ọkụ na-adịkarịkwa.
5. Igbe valvụ na-arụ ọrụ ọtụtụ (Valve Manifold Box, VMB) Nkọwa:
Ọ bụ ikesa gas pụrụ iche site na isi iyi gas na njedebe akụrụngwa dị iche iche.
Nha pipeline dị n'ime: 1/4 inch usoro pipeline, na 1/4 - 3/8 inch pipeline. Sistemu nwere ike iji njikwa kọmpụta chọọ valvụ arụrụ arụ ma ọ bụ ọnọdụ ọnụ ala dị ala na valvụ ntuziaka.
Ngwaahịa usoro: akwa akwa diaphragm valves / bellows valves, valves nlele, nkwonkwo dị ọcha dị elu (VCR, ụdị micro-welding), nrụgide na-achịkwa valves, nrụgide nrụgide na nrụgide nrụgide, wdg Maka nkesa nke ụfọdụ gas inert, Valve Manifold Panel. - A na-ejikarị VMP (valvụ diski ọtụtụ ọrụ) eme ihe, nke nwere oghere diski gas na-emeghe ma ọ chọghị imewe oghere mechiri emechi yana nchacha nitrogen ọzọ.
6. Efere valvụ nke abụọ / igbe (Ngwaọrụ hookup Panel) Nkọwa:
Jikọọ gas nke ihe semiconductor chọrọ site na isi iyi gas na njedebe akụrụngwa ma nye ụkpụrụ nrụgide kwekọrọ. Ogwe a bụ usoro nchịkwa gas nke dị nso na njedebe ngwá ọrụ karịa VMB (igbe valve ọtụtụ ọrụ).
Nha pipeline gas: 1/4 - 3/8 inch
Nha pipeline mmiri: 1/2 - 1 inch
Nha ọkpọkọ mkpofu: 1/2 - 1 inch
Isi ngwaahịa: valvụ diaphragm / valvụ bellow, valvụ otu ụzọ, valvụ na-achịkwa nrụgide, nlele nrụgide, ihe nrụnye nrụgide, nkwonkwo dị ọcha (VCR, micro-welding), nkwonkwo ferrule, valvụ bọọlụ, sooks, wdg.
Oge nzipu: Nov-22-2024